Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser
Date
2017
Authors
Fang, Zhiwei
Yao, Ni
Wang, Min
Lin, Jintian
Zhang, Jianhao
Wu, Rongbo
Qiao, Lingling
Fang, Wei
Lu, Tao
Cheng, Ya
Journal Title
Journal ISSN
Volume Title
Publisher
International Journal of Optomechatronics
Abstract
We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-mu m diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 x 10(5) is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.
Description
Keywords
double disk, integrated optics, lithium niobate, microfabrication, microresonator
Citation
Fang, Z.; Yao, N.; Wang, M.; Lin, J.; Zhang, J.; Wu, R.; … & Cheng, Y. (2017). Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser. International Journal of Optomechatronics, 11(1), 47-54. https://doi.org/10.1080/15599612.2017.1406024