Fang, ZhiweiYao, NiWang, MinLin, JintianZhang, JianhaoWu, RongboQiao, LinglingFang, WeiLu, TaoCheng, Ya2018-07-192018-07-1920172017Fang, Z.; Yao, N.; Wang, M.; Lin, J.; Zhang, J.; Wu, R.; … & Cheng, Y. (2017). Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser. International Journal of Optomechatronics, 11(1), 47-54. https://doi.org/10.1080/15599612.2017.1406024https://doi.org/10.1080/15599612.2017.1406024http://hdl.handle.net/1828/9738We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-mu m diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 x 10(5) is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.endouble diskintegrated opticslithium niobatemicrofabricationmicroresonatorArticleDepartment of Electrical and Computer Engineering