Sukardi, Henry2015-08-142015-08-1420152015-08-14http://hdl.handle.net/1828/6453MEMS technology is a growing field that requires more automative tools to lower the cost of production. Current industry standards of tele-operated 3D manipulated MEMS parts to create new devices are labor intensive and expensive process. Using computer vision as a main feedback tool to recognize parts on chip, it is possible to program a close loop system to instruct a computer to pick and assemble parts on the chip without the aid of a user. To make this process a viable means, new chip designs, robotic systems and computer vision algorithms working along side with motion controllers have to be developed.enAvailable to the World Wide WebMEMSComputer VisionRoboticsMechatronicsThesis