Development of a heterodyne interferometer for nanometer scale displacement measurement

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dc.contributor.authorStibich, Aaronen_US
dc.date.accessioned2024-08-15T18:25:54Z
dc.date.available2024-08-15T18:25:54Z
dc.date.copyright1997en_US
dc.date.issued1997
dc.degree.departmentDepartment of Mechanical Engineeringen_US
dc.degree.levelMaster of Applied Science M.A.Sc.en
dc.description.abstractThe following thesis discusses the development of a heterodyne interferometer for the purpose of nanometer scale displacement measurements. High resolution displacement transducers are employed in numerous applications, including vibration analysis, surface profiling, position control, tilt meters, and non-destructive quality evaluation of solid parts. The University of Victoria Institute for Robotics and Intelligent Systems (IRIS) research group has recently established a materials and mechatronics laboratory, creating a need for a high resolution displacement transducer. Design criteria for this device are sub­nanometer resolution, a sample rate of approximately 1 kHz, a dynamic range (measurement range / resolution) of 1x10₇ or more, and enough flexibility and robustness to take measurements in a variety of research projects . Research into the available technologies led to the conclusion that a heterodyne interferometer was the best candidate. This tech­nique has a wide bandwidth, excellent dynamic range, and is highly resistant to noise. A heterodyne interferometer was successfully assembled and calibrated with 1 mm accuracy and sub-nanometer resolution.
dc.format.extent101 pages
dc.identifier.urihttps://hdl.handle.net/1828/19798
dc.rightsAvailable to the World Wide Weben_US
dc.titleDevelopment of a heterodyne interferometer for nanometer scale displacement measurementen_US
dc.typeThesisen_US

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