Buckling free and high optical quality factor large thin rib disk

dc.contributor.authorHonari, Shahin
dc.contributor.supervisorLu, Tao
dc.date.accessioned2024-08-26T20:50:23Z
dc.date.available2024-08-26T20:50:23Z
dc.date.issued2024
dc.degree.departmentDepartment of Electrical and Computer Engineering
dc.degree.levelDoctor of Philosophy PhD
dc.description.abstractThis thesis investigates the fabrication and characterization of Silica on Silicon (SoS) microcavities, for potential comb generation and sensing applications. In this thesis, novel approaches were introduced on silica-on-silicon microdisks to remove some of the inherent hurdles, namely mitigating the rough surface through chemo-mechanical polishing, and suppressing buckling-induced mechanical instability by introducing a rib disk structure. Quality factors as high as 10₈ were achieved for polished disks. Furthermore using the rib-disk structure, microdisks with thickness smaller than 1.5µm and quality factors as high as 10₇ materialized. By addressing these challenges we unleash the enormous potentials of ultra-high Q silica microdisks in microcomb generation in visible regime and sensing. Finally, a multi-transverse mode dense comb generation scheme on this platform is investigated.
dc.description.scholarlevelGraduate
dc.identifier.urihttps://hdl.handle.net/1828/20308
dc.languageEnglisheng
dc.language.isoen
dc.rightsAvailable to the World Wide Web
dc.titleBuckling free and high optical quality factor large thin rib disk
dc.typeThesis

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