Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

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dc.contributor.authorFang, Zhiwei
dc.contributor.authorYao, Ni
dc.contributor.authorWang, Min
dc.contributor.authorLin, Jintian
dc.contributor.authorZhang, Jianhao
dc.contributor.authorWu, Rongbo
dc.contributor.authorQiao, Lingling
dc.contributor.authorFang, Wei
dc.contributor.authorLu, Tao
dc.contributor.authorCheng, Ya
dc.date.accessioned2018-07-19T14:40:48Z
dc.date.available2018-07-19T14:40:48Z
dc.date.copyright2017en_US
dc.date.issued2017
dc.description.abstractWe demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-mu m diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 x 10(5) is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.en_US
dc.description.reviewstatusRevieweden_US
dc.description.scholarlevelFacultyen_US
dc.description.sponsorshipNational Basic Research Program of China (Program 973, 2014CB921300), Natural National Science Foundation of China (NSFC; 61590934, 61505231, 61405220, 61327902, and 61590934), the Fundamental Research Funds for the Central Universities, and the Open Fund of the State Key Laboratory on Integrated Optoelectronics (IOSKL2015KF34).en_US
dc.identifier.citationFang, Z.; Yao, N.; Wang, M.; Lin, J.; Zhang, J.; Wu, R.; … & Cheng, Y. (2017). Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser. International Journal of Optomechatronics, 11(1), 47-54. https://doi.org/10.1080/15599612.2017.1406024en_US
dc.identifier.urihttps://doi.org/10.1080/15599612.2017.1406024
dc.identifier.urihttp://hdl.handle.net/1828/9738
dc.language.isoenen_US
dc.publisherInternational Journal of Optomechatronicsen_US
dc.subjectdouble disk
dc.subjectintegrated optics
dc.subjectlithium niobate
dc.subjectmicrofabrication
dc.subjectmicroresonator
dc.subject.departmentDepartment of Electrical and Computer Engineering
dc.titleFabrication of high quality factor lithium niobate double-disk using a femtosecond laseren_US
dc.typeArticleen_US

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